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@ARTICLE{kasparPSSC2011,
    author = {Kaspar, Peter and Fougner, Christopher and Kappeler, Roman and J{\"{a}}ckel, Heinz},
     month = nov,
     title = {Limitations of Cl2/O2-based ICP-RIE of deep holes for planar photonic crystals in InP},
   journal = {Phys. Status Solidi C},
    volume = {9},
    number = {2},
      year = {2011},
     pages = {239-242},
       url = {http://onlinelibrary.wiley.com/doi/10.1002/pssc.201100223/abstract},
       doi = {10.1002/pssc.201100223}
}