TY  - JOUR
ID  - kasparPSSC2011
T1  - Limitations of Cl2/O2-based ICP-RIE of deep holes for planar photonic crystals in InP
A1  - Kaspar, Peter
A1  - Fougner, Christopher
A1  - Kappeler, Roman
A1  - Jäckel, Heinz
JA  - Phys. Status Solidi C
Y1  - 2011
VL  - 9
IS  - 2
SP  - 239
EP  - 242
UR  - http://onlinelibrary.wiley.com/doi/10.1002/pssc.201100223/abstract
M2  - doi: 10.1002/pssc.201100223
ER  -